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Design for Manufacturability with Advanced Lithography
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Design for Manufacturability with Advanced Lithography

Författare:
Engelska
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This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
Författare
Bei Yu, David Z. Pan
Upplaga
Softcover reprint of the original 1st ed. 2016
ISBN
9783319373935
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2016-08-23
Sidor
164