MEMS Materials and Processes Handbook

MEMs Materials and Processes Handbook"e; is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "e;Materials"e; and "e;Processes"e;. The extensive Material Selection Guide"e; and a "e;Material Database"e; guides the reader through the selection of appropriate materials for the required task at hand. The "e;Processes"e; section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.