Wafer Fabrication: Factory Performance and Analysis

Understanding the details of wafer fabrication processes and the related aspects of electronic devices can be an overwhelming task in the absence of a systematic, comprehensive view of the technology. This book aims to provide this perspective. The author presents a complete treatment of both the technology of wafer fabrication and the factories where it occurs, while presenting methods for the analysis and prediction of the performance of these factories. Offering a comprehensive understanding of the "wafer fab" process, this book is intended for a wide range of engineers and managers in the electronics industry.