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Ultraclean Surface Processing of Silicon Wafers
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Ultraclean Surface Processing of Silicon Wafers

Engelska
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This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.
Undertitel
Secrets of VLSI Manufacturing
Upplaga
1st ed. Softcover of orig. ed. 1998
ISBN
9783642082726
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2010-12-07
Sidor
616