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The Physics of Microfabrication
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The Physics of Microfabrication

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The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years.
Upplaga
Softcover reprint of the original 1st ed. 1982
ISBN
9781489921628
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2013-06-26
Sidor
504