
Poly-SiGe for MEMS-above-CMOS Sensors
Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.
- Författare
- Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw
- Upplaga
- 2014 ed.
- ISBN
- 9789400767980
- Språk
- Engelska
- Vikt
- 446 gram
- Utgivningsdatum
- 2013-07-30
- Förlag
- Springer
- Sidor
- 199
