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Modelling of Microfabrication Systems
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Modelling of Microfabrication Systems

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Upplaga
Softcover reprint of hardcover 1st ed. 2003
ISBN
9783642055362
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2010-12-08
Sidor
270