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Modelling of Microfabrication Systems
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Modelling of Microfabrication Systems

inbunden, 2003
Engelska
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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Upplaga
2003 ed.
ISBN
9783540002529
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
2003-06-13
Sidor
270