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Ion Implantation and Synthesis of Materials
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Ion Implantation and Synthesis of Materials

inbunden, 2006
Engelska
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Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
Upplaga
2006 ed.
ISBN
9783540236740
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
2006-08-09
Sidor
263