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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets

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This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.

Upplaga
Softcover reprint of the original 1st ed. 2017
ISBN
9783319882840
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2018-05-18
Sidor
164