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Design and Manufacturing of Active Microsystems
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Design and Manufacturing of Active Microsystems

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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
Upplaga
2011 ed.
ISBN
9783642267383
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2014-03-21
Sidor
444