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Defects and Properties of Semiconductors
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Defects and Properties of Semiconductors

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Defect study in semiconductor engineering started originally with seeking methods how to suppress generation of harmful defects during device processing in order to achieve a high yield of device fabrication.
Undertitel
Defect Engineering
Upplaga
Softcover reprint of the original 1st ed. 1987
ISBN
9789401086165
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2011-12-25
Förlag
Springer
Sidor
300