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Silicon Carbide Microsystems for Harsh Environments
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Silicon Carbide Microsystems for Harsh Environments

This book reviews state-of-the-art Silicon Carbide (SiC) technologies. It includes reviews of MEMS devices and provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
Upplaga
2011 ed.
ISBN
9781461428824
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2013-07-14
Sidor
232