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Subsecond Annealing of Advanced Materials
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Subsecond Annealing of Advanced Materials

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing.
Undertitel
Annealing by Lasers, Flash Lamps and Swift Heavy Ions
Upplaga
2014 ed.
ISBN
9783319031309
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
2013-12-30
Sidor
321