Silicon Anodization as a Structuring Technique
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
- Undertitel
- Literature Review, Modeling and Experiments
- Författare
- Alexey Ivanov
- Upplaga
- 1st ed. 2018
- ISBN
- 9783658192372
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2017-09-22
- Förlag
- Springer
- Sidor
- 316