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Precursor Chemistry of Advanced Materials
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Precursor Chemistry of Advanced Materials

inbunden, 2005
Engelska

Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials.

Undertitel
CVD, ALD and Nanoparticles
Upplaga
2005 ed.
ISBN
9783540016052
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
2005-09-29
Sidor
214