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Precision Nanometrology
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Precision Nanometrology

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items.
Undertitel
Sensors and Measuring Systems for Nanomanufacturing
Författare
Wei Gao
Upplaga
2010 ed.
ISBN
9781447157434
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
4.11.2014
Sidor
354