Spara
Plasma Processing of Semiconductors
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
- Redaktör
- P.F. Williams
- Upplaga
- Softcover reprint of the original 1st ed. 1997
- ISBN
- 9789401064866
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 12.10.2012
- Förlag
- Springer
- Sidor
- 613
