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Plasma Deposited Thin Films

Författare:
engelska
346,40 €

In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.

Författare
J. Mort, F. Jansen
ISBN
9781351092715
Språk
engelska
Utgivningsdatum
4.5.2018