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Plasma Charging Damage
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Plasma Charging Damage

Författare:
Engelska
In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.
Författare
Kin P. Cheung
Upplaga
Softcover reprint of the original 1st ed. 2001
ISBN
9781447110620
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2012-08-30
Sidor
346