
Outlook and Challenges of Nano Devices, Sensors, and MEMS
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things.
- Upplaga
- Softcover reprint of the original 1st ed. 2017
- ISBN
- 9783319845005
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2018-07-13
- Sidor
- 521