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Novel Silicon Based Technologies
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Novel Silicon Based Technologies

inbunden, 1991
Engelska

Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for

Undertitel
Conference Proceedings
Redaktör
R. A. Levy
ISBN
9780792311126
Språk
Engelska
Vikt
588 gram
Utgivningsdatum
1991-01-31
Sidor
292