Novel Silicon Based Technologies
Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for
- Undertitel
- Conference Proceedings
- Redaktör
- R. A. Levy
- ISBN
- 9780792311126
- Språk
- Engelska
- Vikt
- 588 gram
- Utgivningsdatum
- 1991-01-31
- Sidor
- 292