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Nanolithography
Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
- Undertitel
- A Borderland between STM, EB, IB, and X-Ray Lithographies
- Redaktör
- M. Gentili, Carlo Giovannella, Stefano Selci
- Upplaga
- Softcover reprint of hardcover 1st ed. 1994
- ISBN
- 9789048143887
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2010-12-05
- Förlag
- Springer
- Sidor
- 216
