Microlithography: High Integration In Microelectronics - Proceedings Of The First Workshop
- Redaktör
- Baranauskas Vitor Baranauskas, Craievich Aldo Craievich, De Souza Gerardo Gerson Bezzera De Souza
- ISBN
- 9789814611909
- Språk
- engelska
- Utgivningsdatum
- 1.5.1990
- Sidor
- 192
