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Low Pressure Plasmas and Microstructuring Technology
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Low Pressure Plasmas and Microstructuring Technology

Författare:
inbunden, 2009
Engelska
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
Författare
Gerhard Franz
Upplaga
2009 ed.
ISBN
9783540858485
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
2009-04-30
Sidor
732