Gå direkt till innehållet
Ion Implantation: Basics to Device Fabrication
Spara

Ion Implantation: Basics to Device Fabrication

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.
Författare
Emanuele Rimini
Upplaga
Softcover reprint of the original 1st ed. 1995
ISBN
9781461359524
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2014-02-23
Sidor
393