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Glow-Discharge Hydrogenated Amorphous Silicon
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Glow-Discharge Hydrogenated Amorphous Silicon

Författare:
inbunden, 1989
Engelska
A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin
Författare
K. Tanaka
Upplaga
1990 ed.
ISBN
9780792303091
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
1989-11-30
Förlag
Springer
Sidor
277