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Flash Lamp Annealing
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Flash Lamp Annealing

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.

Undertitel
From Basics to Applications
Upplaga
2019 ed.
ISBN
9783030232986
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
2019-08-06
Sidor
288