
Flash Lamp Annealing
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
- Undertitel
- From Basics to Applications
- Författare
- Lars Rebohle, Slawomir Prucnal, Denise Reichel
- Upplaga
- 2019 ed.
- ISBN
- 9783030232986
- Språk
- Engelska
- Vikt
- 446 gram
- Utgivningsdatum
- 2019-08-06
- Sidor
- 288