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Epitaxy of Semiconductors
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Epitaxy of Semiconductors

The book discusses the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and it describes the major growth techniques: metalorganic vapor-phase epitaxy, molecular-beam epitaxy, and liquid-phase epitaxy.
Undertitel
Physics and Fabrication of Heterostructures
Författare
Udo W. Pohl
Upplaga
Second Edition 2020
ISBN
9783030438715
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2021-07-22
Sidor
535