Electrical Characterization of Silicon-on-Insulator Materials and Devices

This text describes a variety of electrical characterization methods, from wafer screening and defect identification to device evaluation. Each technique comes with technical information - experimental set-up, basic models, parameter extraction - that should be useful to the reader. The book offers a treatment of all aspects of the latest SOI technologies, including material synthesis, device physics, characterization, circuit applications and reliability issues. Both the academic researchers and engineers working on the SOI technology should find this book useful as a source of scientific information, practical details and references. For people planning to enter the SOI field, this book offers a coverage of the SOI technology and a presentation of the underlying concepts.