Spara
Dry Etching for VLSI
Författare:
häftad, 2013
Engelska
This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.
- Författare
- A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
- Upplaga
- Softcover reprint of the original 1st ed. 1991
- ISBN
- 9781489925688
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2013-05-29
- Sidor
- 237
