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Design for Manufacturability with Advanced Lithography
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Design for Manufacturability with Advanced Lithography

Författare:
inbunden, 2015
Engelska
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
Författare
Bei Yu, David Z. Pan
Upplaga
1st ed. 2016
ISBN
9783319203843
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
23.11.2015
Sidor
164