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Design and Manufacturing of Active Microsystems
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Design and Manufacturing of Active Microsystems

inbunden, 2011
Engelska
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
Upplaga
2011
ISBN
9783642129025
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
2011-03-10
Sidor
444