Spara
Crucial Issues in Semiconductor Materials and Processing Technologies
World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues.
- Redaktör
- S. Coffa, F. Priolo, Emanuele Rimini, J.M. Poate
- Upplaga
- Softcover reprint of the original 1st ed. 1992
- ISBN
- 9789401052030
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2012-10-13
- Förlag
- Springer
- Sidor
- 538
