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Advanced MEMS/NEMS Fabrication and Sensors
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Advanced MEMS/NEMS Fabrication and Sensors

Engelska
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
Redaktör
Zhuoqing Yang
Upplaga
2022 ed.
ISBN
9783030797515
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2022-10-13
Sidor
312