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Sökt på: Böcker av Jane P. Chang
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Lecture Notes on Principles of Plasma Processing
E-bok,
2012,
Engelska,
ISBN 9781461501817
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these …
Lecture Notes on Principles of Plasma Processing
häftad,
2003,
Engelska,
ISBN 9780306474972
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these …