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Ion Implantation and Synthesis of Materials
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Ion Implantation and Synthesis of Materials

Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
Upplaga
Softcover reprint of hardcover 1st ed. 2006
ISBN
9783642062599
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2010-02-12
Sidor
263