
Meta-Pellicle Wavefront Pre-Correction for High-NA EUV Lithography
- Undertitel
- Metasurface pellicles, phase/polarization pre-distortion, mask 3D shadowing compensation, Zernike budget tuning, thermal-radiative co-design, 2 nm/3 nm EPE/MEEF reduction With Python
- Författare
- H Wu
- ISBN
- 9798279048793
- Språk
- Engelska
- Vikt
- 812 gram
- Utgivningsdatum
- 2025-12-19
- Förlag
- Independently Published
- Sidor
- 350
