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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
inbunden,
2002,
Engelska,
ISBN 9781402071935
As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can …
Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
häftad,
2014,
Engelska,
ISBN 9781461354246
As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can …