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Meta-Pellicle Wavefront Pre-Correction for High-NA EUV Lithography
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Meta-Pellicle Wavefront Pre-Correction for High-NA EUV Lithography

Forfatter:
pocket, 2025
Engelsk
Undertittel
Metasurface pellicles, phase/polarization pre-distortion, mask 3D shadowing compensation, Zernike budget tuning, thermal-radiative co-design, 2 nm/3 nm EPE/MEEF reduction With Python
Forfatter
H Wu
ISBN
9798279048793
Språk
Engelsk
Vekt
812 gram
Utgivelsesdato
19.12.2025
Antall sider
350