
Meta-Pellicle Wavefront Pre-Correction for High-NA EUV Lithography
- Undertittel
- Metasurface pellicles, phase/polarization pre-distortion, mask 3D shadowing compensation, Zernike budget tuning, thermal-radiative co-design, 2 nm/3 nm EPE/MEEF reduction With Python
- Forfatter
- H Wu
- ISBN
- 9798279048793
- Språk
- Engelsk
- Vekt
- 812 gram
- Utgivelsesdato
- 19.12.2025
- Forlag
- Independently Published
- Antall sider
- 350
