
Meta-Pellicle Wavefront Pre-Correction for High-NA EUV Lithography
- Alaotsikko
- Metasurface pellicles, phase/polarization pre-distortion, mask 3D shadowing compensation, Zernike budget tuning, thermal-radiative co-design, 2 nm/3 nm EPE/MEEF reduction With Python
- Kirjailija
- H Wu
- ISBN
- 9798279048793
- Kieli
- englanti
- Paino
- 812 grammaa
- Julkaisupäivä
- 19.12.2025
- Kustantaja
- Independently Published
- Sivumäärä
- 350