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Hakutulokset: Hakutulos
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yhteensä 2 hakutulosta
Polymers in Microlithography
sidottu,
2002,
englanti,
ISBN 9780841217010
This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and …
Microelectronics Technology
sidottu,
1995,
englanti,
ISBN 9780841233324
Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations. Reports novel chemistry for single layer 193nm lithographic …