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Physics of Micro/Nano-Fabrication
E-bok,
2013,
Engelska,
ISBN 9781475767759
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze …
Physics of Microfabrication
E-bok,
2013,
Engelska,
ISBN 9781489921604
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances …