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This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based …
This book provides a comprehensive treatment of the very interdisciplinary ?eld of CMOS technology-based chemical microsensor systems. It is, on the one hand, targeted at …
This book provides a comprehensive treatment of the very interdisciplinary ?eld of CMOS technology-based chemical microsensor systems. It is, on the one hand, targeted at …
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and …
Since the beginning of the nineties, shape memory alloys (SMA) have become available for microsystems technology. Currently the breadth of research and development activities on …
Since the beginning of the nineties, shape memory alloys (SMA) have become available for microsystems technology. Currently the breadth of research and development activities on …