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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a …
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of …
BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for …
Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems describes MEMS technology and demonstrates how MEMS allow miniaturization, parallel …
Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized …