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Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in semiconductor manufacturing. …
Heterogeneous catalysis is undergoing a dramatic change driven by the need to develop more efficient catalyst systems for the production of specialty chemicals and the development …
For many years, electroactive ceramic, magnetostrictive material and shape memory alloys have been the primary source of actuation materials for manipulation and mobility systems. …
This book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of …
High-temperature structural intermetallics continue to be an active field of research because they offer the promise of structural properties, oxidation resistance and service …
Increasing research and development efforts have been dedicated to the field of electroresponsive polymers (ERPs), including the development of materials and devices. In addition …
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.