A detailed study of the science, engineering and applications of terahertz technology, based on room-temperature solid-state devices, which are seen as the key technology for …
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, …
The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The …
These volumes contain the edited documents presented at the NATO-Sponsored Advanced Research Workshop (ARW) on Partial Pre8tre88ing, from Theory to Practice, held at the CEBTP …