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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a …
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural …
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of …
BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for …
Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems describes MEMS technology and demonstrates how MEMS allow miniaturization, parallel …
Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in …
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural …
Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems describes MEMS technology and demonstrates how MEMS allow miniaturization, parallel …
BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for …
“Radioisotope Thin-Film Powered Microsystems” describes high energy density microbatteries required for compact long lifetime wireless sensor Microsystems. These microbatteries …