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Hakutulokset: Kirjoja kirjailijalta Markku Airaksinen
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yksi hakutulos.
Handbook of Silicon Based MEMS Materials and Technologies
e-kirja,
2009,
englanti,
ISBN 9780815519881
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics …